Rahim Faez
Associate Professor
faez@sharif.edu
rfaez@yahoo.com
+98-21-66164350
103 West-Ground Floor
Department of Electrical Engineering, Sharif University of Technology, Azadi Ave., Tehran, Iran.
Office Hours:
Sunday & Tuesday Morning 8-12
Main References:
1- James D. Plummer, Michael D. Deal and Peter B. Griffin, Silicon VLSI Technology, Fundamentals, Practice and Modeling, Prentice Hall, Inc. 2000.
Supplementary References:
1- Badih El-Kareh, Fundamentals of Semiconductor Processing Technology, Springer 1995.
2- Simon M. Sze and Ming-Kwei Lee, Semiconductor Devices: Physics and Technology, Wiley, 2012.
Course Syllabus:
1- Review of Semiconductor Physics
2- Crystal Growth, Wafer Fabrication and Properties
3- Clean Rooms and Wafer Cleaning
4- Photolithography
5- Thermal Oxidation
6- Diffusion
7- Ion Implantation
8- Thin Film Deposition
9- Etching
10- Backend Technology
11- CMOS Technology
